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dc.titleRotational stage for high speed, large area scanning in focused beam systems
dc.contributor.authorLIU, YONG YU
dc.contributor.authorCHAN, DANIEL S. H.
dc.contributor.authorPHANG, JACOB C. H.
dc.identifier.citationLIU, YONG YU,CHAN, DANIEL S. H.,PHANG, JACOB C. H. (2004-08-17). Rotational stage for high speed, large area scanning in focused beam systems. ScholarBank@NUS Repository.
dc.description.abstractA mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.description.patenttypeGranted Patent
dc.contributor.patentassigneeNATIONAL UNIVERSITY OF SINGAPORE
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