Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/32682
DC Field | Value | |
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dc.title | Rotational stage for high speed, large area scanning in focused beam systems | |
dc.contributor.author | LIU, YONG YU | |
dc.contributor.author | CHAN, DANIEL S. H. | |
dc.contributor.author | PHANG, JACOB C. H. | |
dc.date.accessioned | 2012-05-02T02:28:49Z | |
dc.date.available | 2012-05-02T02:28:49Z | |
dc.date.issued | 2004-08-17 | |
dc.identifier.citation | LIU, YONG YU,CHAN, DANIEL S. H.,PHANG, JACOB C. H. (2004-08-17). Rotational stage for high speed, large area scanning in focused beam systems. ScholarBank@NUS Repository. | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/32682 | |
dc.description.abstract | A mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method. | |
dc.description.uri | http://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/http://analytics.patsnap.com/patent_view/view?pn=US6777688 | |
dc.source | PatSnap | |
dc.type | Patent | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.identifier.isiut | NOT_IN_WOS | |
dc.description.patentno | US6777688 | |
dc.description.patenttype | Granted Patent | |
dc.contributor.patentassignee | NATIONAL UNIVERSITY OF SINGAPORE | |
Appears in Collections: | Staff Publications |
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US6777688.PDF | 67.56 kB | Adobe PDF | OPEN | Published | View/Download |
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