Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/32682
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dc.titleRotational stage for high speed, large area scanning in focused beam systems
dc.contributor.authorLIU, YONG YU
dc.contributor.authorCHAN, DANIEL S. H.
dc.contributor.authorPHANG, JACOB C. H.
dc.date.accessioned2012-05-02T02:28:49Z
dc.date.available2012-05-02T02:28:49Z
dc.date.issued2004-08-17
dc.identifier.citationLIU, YONG YU,CHAN, DANIEL S. H.,PHANG, JACOB C. H. (2004-08-17). Rotational stage for high speed, large area scanning in focused beam systems. ScholarBank@NUS Repository.
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/32682
dc.description.abstractA mechanical scanning stage for high speed image acquisition in a focused beam system. The mechanical scanning stage preferably is a combination of four stages. A first stage provides linear motion. A second stage, above the first stage, provides rotational positioning. A third stage above the rotational stage is moveable in a first linear direction, and the fourth stage above the third stage is positionable in a second linear direction orthogonal to the first direction. The four stages are responsive to input from a controller programmed with a polar coordinate pixel addressing method, for positioning a specimen mounted on the mechanical stage to allow an applied static focus beam to irradiate selected areas of interest, thereby imaged by collecting signals from the specimen using a polar coordinate pixel addressing method.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/http://analytics.patsnap.com/patent_view/view?pn=US6777688
dc.sourcePatSnap
dc.typePatent
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.identifier.isiutNOT_IN_WOS
dc.description.patentnoUS6777688
dc.description.patenttypeGranted Patent
dc.contributor.patentassigneeNATIONAL UNIVERSITY OF SINGAPORE
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