DATA-DRIVEN ANALYSIS ON THE CONTACT RESONANCE FREQUENCY IN THE STRAIN-BASED SPM

Abstract

In the field of strain-based scanning probe microscopy (SPM), the models describing the tip-sample system and the tip-induced phenomena are still insufficient, and there are ambiguous factors in the SPM signals which need further explanation. In this study, we focus on the signals of the contact resonance frequency in the strain-based SPM. The first part focuses on the observation of the bias-modulated strain-based SPM measurements conducted on a variety of materials. In the second part, a simple physical model is developed to describe the evolution of the electrostatic force during the bias-modulated strain-based SPM measurements. In the third part, principal component analysis and correlation analysis are used to decompose the signals. In the last part, the support vector machine is used to predict the domain evolution. The results show that it is a successful attempt for the development of SPM and materials characterization in a data-driven way.