Please use this identifier to cite or link to this item: https://doi.org/10.1063/5.0073349
Title: The nature of column boundaries in micro-structured silicon oxide nanolayers
Authors: Patel, K.
Cottom, J.
Mehonic, A.
Ng, W. H.
Kenyon, A. J.
Bosman, M. 
Shluger, A. L.
Issue Date: 1-Dec-2021
Publisher: American Institute of Physics Inc.
Citation: Patel, K., Cottom, J., Mehonic, A., Ng, W. H., Kenyon, A. J., Bosman, M., Shluger, A. L. (2021-12-01). The nature of column boundaries in micro-structured silicon oxide nanolayers. APL Materials 9 (12) : 121107. ScholarBank@NUS Repository. https://doi.org/10.1063/5.0073349
Rights: Attribution 4.0 International
Abstract: Columnar microstructures are critical for obtaining good resistance switching properties in SiOx resistive random access memory (ReRAM) devices. In this work, the formation and structure of columnar boundaries are studied in sputtered SiOx layers. Using TEM measurements, we analyze SiOx layers in Me-SiOx-Mo heterostructures, where Me = Ti or Au/Ti. We show that the SiOx layers are templated by the Mo surface roughness, leading to the formation of columnar boundaries protruding from troughs at the SiOx/Mo interface. Electron energy-loss spectroscopy measurements show that these boundaries are best characterized as voids, which in turn facilitate Ti, Mo, and Au incorporation from the electrodes into SiOx. Density functional theory calculations of a simple model of the SiO2 grain boundary and column boundary show that O interstitials preferentially reside at the boundaries rather than in the SiO2 bulk. The results elucidate the nature of the SiOx microstructure and the complex interactions between the metal electrodes and the switching oxide, each of which is critically important for further materials engineering and the optimization of ReRAM devices. © 2021 Author(s).
Source Title: APL Materials
URI: https://scholarbank.nus.edu.sg/handle/10635/232276
ISSN: 2166-532X
DOI: 10.1063/5.0073349
Rights: Attribution 4.0 International
Appears in Collections:Staff Publications
Elements

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
10_1063_5_0073349.pdf8.89 MBAdobe PDF

OPEN

NoneView/Download

SCOPUSTM   
Citations

2
checked on Nov 21, 2022

Page view(s)

5
checked on Nov 17, 2022

Google ScholarTM

Check

Altmetric


This item is licensed under a Creative Commons License Creative Commons