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Title: Laser microprocessing and fabrication of structures on glass substrates
Keywords: glass, laser, microprocessing, large-area, maskless, direct-write
Issue Date: 11-Sep-2010
Citation: HUANG ZHIQIANG (2010-09-11). Laser microprocessing and fabrication of structures on glass substrates. ScholarBank@NUS Repository.
Abstract: Glass is a useful and important material that has many uses in modern society, ranging from microelectronics, solar cells, optical engineering, biomedical to everyday appliances. It has excellent physical properties, such as high transparency in a wide wavelength range, strong resistance to thermal and mechanical stress, and high chemical stabilities. However, due to these outstanding properties, the quality processing of glass is challenging. On the other hand, advances in technology have created the need for micro- and nano-structures. Conventional methods of processing glass are insufficient to fabricate these micro- and nano-structures on glass. Semiconductor processing techniques, such as photolithography and e-beam lithography, are costly tools to own and operate. Therefore, the goal of this thesis is to investigate alternative methods to achieve micro-/nano-processing of glass by the use of advanced lasers technologies. The methods are aimed to be cost-effective and easy to be implemented, as well as being maskless and direct writing.
Appears in Collections:Ph.D Theses (Open)

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