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https://doi.org/10.1063/1.3062847
| Title: | Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications | Authors: | Satyanarayana, N. Lau, K.H. Sinha, S.K. |
Issue Date: | 2008 | Citation: | Satyanarayana, N., Lau, K.H., Sinha, S.K. (2008). Nanolubrication of poly(methyl methacrylate) films on Si for microelectromechanical systems applications. Applied Physics Letters 93 (26). ScholarBank@NUS Repository. https://doi.org/10.1063/1.3062847 | Source Title: | Applied Physics Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/21642 | ISSN: | 00036951 | DOI: | 10.1063/1.3062847 |
| Appears in Collections: | Staff Publications |
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