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Title: Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules
Authors: Ding, B.
Yang, Z.-X.
Xiao, X. 
Zhang, G.
Keywords: function modules
low cost
Reconfigurable micro-positioning stage
Issue Date: 2019
Publisher: Institute of Electrical and Electronics Engineers Inc.
Citation: Ding, B., Yang, Z.-X., Xiao, X., Zhang, G. (2019). Design of Reconfigurable Planar Micro-Positioning Stages Based on Function Modules. IEEE Access 7 : 15102-15112. ScholarBank@NUS Repository.
Rights: Attribution-NonCommercial-NoDerivatives 4.0 International
Abstract: Micro-positioning stages, which are capable to meet the emerging industrial trend for performing various kinds of micro-manipulation and micro-assembly tasks are the crucial tools to miniaturize the products under ultra-high precision. The current main practice is to specifically tailor a monolithic positioning stage design for one kind of micro-manipulation application. However, the design and fabrication of such a specific flexure-based micro-positioning stage are expensive in both the time and financial investment. In order to increase the flexibility and functionality of micro-positioning stages, this paper proposes a novel reconfigurable planar micro-positioning stages platform based on different function modules. A functional model-based approach is developed to divide one micro-positioning stage into a set of functionally independent sub-models, which allows flexible composition resulting in an adjustable new stage. The robustness of the proposed platform is demonstrated using some typical micro-positioning stages benchmarking cases. The effectiveness of assembly using flexible function modules is verified to show the benefits of the proposed design platform for reconfigurable micro-positioning stages. © 2013 IEEE.
Source Title: IEEE Access
ISSN: 2169-3536
DOI: 10.1109/ACCESS.2019.2894619
Rights: Attribution-NonCommercial-NoDerivatives 4.0 International
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