Please use this identifier to cite or link to this item: https://doi.org/10.1515/nanoph-2021-0029
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dc.titleSuspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications
dc.contributor.authorLIU WEIXIN
dc.contributor.authorYIMING MA
dc.contributor.authorCHANG YUHUA
dc.contributor.authorDONG BOWEI
dc.contributor.authorWEI JINGXUAN
dc.contributor.authorREN ZHIHAO
dc.contributor.authorLEE CHENGKUO
dc.date.accessioned2021-09-03T03:59:52Z
dc.date.available2021-09-03T03:59:52Z
dc.date.issued2021-05-07
dc.identifier.citationLIU WEIXIN, YIMING MA, CHANG YUHUA, DONG BOWEI, WEI JINGXUAN, REN ZHIHAO, LEE CHENGKUO (2021-05-07). Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications. Nanophotonics 10 (7) : 1861-1870. ScholarBank@NUS Repository. https://doi.org/10.1515/nanoph-2021-0029
dc.identifier.issn21928614
dc.identifier.urihttps://scholarbank.nus.edu.sg/handle/10635/200189
dc.description.abstractLong-wave infrared (LWIR, 6–14 μm) processes enormous potential for chem/biosensing as it covers abundant molecular absorption fingerprints. Waveguides provide an attractive chip-scale miniaturization solution for optical sensors. However, the exploration of waveguide sensors in this wavelength range is limited. Here, an LWIR photonic platform for fast and sensitive on-chip gas sensing is developed using suspended silicon (Si) waveguide supported by subwavelength grating (SWG) metamaterial claddings. This platform provides a viable approach to fully exploit the transparency window of Si. The SWG structure provides a promising solution to engineer the mode profile for strong light–analyte interaction. Propagation loss and bending loss are studied in the broad wavelength range of 6.4–6.8 μm. Functional devices including grating couplers, Y-junctions, and directional couplers are also demonstrated with high performance. Sensing demonstration based on our platform is presented using toluene vapor detection as an example. The corresponding limit of detection reaches 75 ppm. The response and recovery time to 75 ppm toluene are about 0.8 and 3.4 s, respectively. This good performance makes our platform a promising candidate for on-site medical and environmental applications.
dc.description.urihttps://www.degruyter.com/document/doi/10.1515/nanoph-2021-0029/html
dc.language.isoen
dc.publisherDE GRUYTER
dc.rightsAttribution-NonCommercial 4.0 International
dc.rights.urihttp://creativecommons.org/licenses/by-nc/4.0/
dc.subjectChemical sensor
dc.subjectmid-infrared
dc.subjectphotonic platform
dc.subjectsubwavelength grating
dc.subjectsuspended Si waveguide
dc.typeArticle
dc.contributor.departmentDEPT OF ELECTRICAL & COMPUTER ENGG
dc.description.doi10.1515/nanoph-2021-0029
dc.description.sourcetitleNanophotonics
dc.description.volume10
dc.description.issue7
dc.description.page1861-1870
dc.published.statePublished
dc.grant.idNRFCRP15- 2015-02
dc.grant.idNRF2015-NRF-ISF001-2620
dc.grant.fundingagencyNational Research Foundation Singapore
dc.grant.fundingagencyNRF-ISF Joint Research Grant
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