Please use this identifier to cite or link to this item: https://doi.org/10.1515/nanoph-2021-0029
Title: Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications
Authors: LIU WEIXIN 
YIMING MA 
CHANG YUHUA 
DONG BOWEI 
WEI JINGXUAN 
REN ZHIHAO 
LEE CHENGKUO 
Keywords: Chemical sensor
mid-infrared
photonic platform
subwavelength grating
suspended Si waveguide
Issue Date: 7-May-2021
Publisher: DE GRUYTER
Citation: LIU WEIXIN, YIMING MA, CHANG YUHUA, DONG BOWEI, WEI JINGXUAN, REN ZHIHAO, LEE CHENGKUO (2021-05-07). Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications. Nanophotonics 10 (7) : 1861-1870. ScholarBank@NUS Repository. https://doi.org/10.1515/nanoph-2021-0029
Rights: Attribution-NonCommercial 4.0 International
Abstract: Long-wave infrared (LWIR, 6–14 μm) processes enormous potential for chem/biosensing as it covers abundant molecular absorption fingerprints. Waveguides provide an attractive chip-scale miniaturization solution for optical sensors. However, the exploration of waveguide sensors in this wavelength range is limited. Here, an LWIR photonic platform for fast and sensitive on-chip gas sensing is developed using suspended silicon (Si) waveguide supported by subwavelength grating (SWG) metamaterial claddings. This platform provides a viable approach to fully exploit the transparency window of Si. The SWG structure provides a promising solution to engineer the mode profile for strong light–analyte interaction. Propagation loss and bending loss are studied in the broad wavelength range of 6.4–6.8 μm. Functional devices including grating couplers, Y-junctions, and directional couplers are also demonstrated with high performance. Sensing demonstration based on our platform is presented using toluene vapor detection as an example. The corresponding limit of detection reaches 75 ppm. The response and recovery time to 75 ppm toluene are about 0.8 and 3.4 s, respectively. This good performance makes our platform a promising candidate for on-site medical and environmental applications.
Source Title: Nanophotonics
URI: https://scholarbank.nus.edu.sg/handle/10635/200189
ISSN: 21928614
DOI: 10.1515/nanoph-2021-0029
Rights: Attribution-NonCommercial 4.0 International
Appears in Collections:Staff Publications
Elements

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
Nanophotonics_10V7_21_Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications.pdfArticle2.09 MBAdobe PDF

OPEN

NoneView/Download
Nanophotonics_10V7_21_Suspended silicon waveguide platform with subwavelength grating metamaterial cladding for long-wave infrared sensing applications_Supp.pdfSupporting material796.84 kBAdobe PDF

OPEN

NoneView/Download

SCOPUSTM   
Citations

5
checked on Dec 4, 2021

Page view(s)

43
checked on Dec 2, 2021

Download(s)

5
checked on Dec 2, 2021

Google ScholarTM

Check

Altmetric


This item is licensed under a Creative Commons License Creative Commons