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Title: Spectrometer attachments for the scanning electron microscope
Authors: LUO TAO
Keywords: spectrometer, SEM, EELS, Backscattered electron
Issue Date: 30-Jan-2009
Citation: LUO TAO (2009-01-30). Spectrometer attachments for the scanning electron microscope. ScholarBank@NUS Repository.
Abstract: This thesis describes the development of some new add-on spectrometer attachments for the Scanning Electron Microscope (SEMs). The first spectrometer uses a magnetic sector split-plate design to acquire high resolution electron energy loss spectrum (EELS) analysis for the primary beam penetrating thin samples. Normally, such experiments are only carried out in transmission electron microscopes. Experimental results presented in this theses show that such techniques are feasible inside a conventional SEM, and can be used to provide valuable preliminary EELS data, before making the commitment to use more specialized transmission electron microscope EELS systems. Results are presented to demonstrate how the split-plate design can correct for second-order geometrical aberration. Spectrometer attachments were also designed to filter the angles and energies of back-scattered electrons (BSEs) Simulation and experiments show that BSEs, surface sensitivity in the final image can be greatly enhanced by detecting only wide-angle BSEs.
Appears in Collections:Ph.D Theses (Open)

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