Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/192120
Title: Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip
Authors: Kalaiselvi, Shenbaga Manogara Pandian 
Xiaosong, Eric Tang
Oskar, Herbert Moser
B.H., Mark Breese 
Turaga, Shuvan Prashant
Kasi, Harsha
Heussler, Sascha Pierre
Issue Date: 18-Jun-2021
Publisher: Springer Nature
Citation: Kalaiselvi, Shenbaga Manogara Pandian, Xiaosong, Eric Tang, Oskar, Herbert Moser, B.H., Mark Breese, Turaga, Shuvan Prashant, Kasi, Harsha, Heussler, Sascha Pierre (2021-06-18). Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip. Nature Nanotechnology. ScholarBank@NUS Repository.
Source Title: Nature Nanotechnology
URI: https://scholarbank.nus.edu.sg/handle/10635/192120
ISSN: 17483387
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