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https://scholarbank.nus.edu.sg/handle/10635/192120
| Title: | Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip | Authors: | Kalaiselvi, Shenbaga Manogara Pandian Xiaosong, Eric Tang Oskar, Herbert Moser B.H., Mark Breese Turaga, Shuvan Prashant Kasi, Harsha Heussler, Sascha Pierre |
Issue Date: | 18-Jun-2021 | Publisher: | Springer Nature | Citation: | Kalaiselvi, Shenbaga Manogara Pandian, Xiaosong, Eric Tang, Oskar, Herbert Moser, B.H., Mark Breese, Turaga, Shuvan Prashant, Kasi, Harsha, Heussler, Sascha Pierre (2021-06-18). Wafer Scale Manufacturing of High Precision Micro-Optical Components through X-Ray Lithography yielding 1800 Gray Levels in a Fingertip Sized Chip. Nature Nanotechnology. ScholarBank@NUS Repository. | Source Title: | Nature Nanotechnology | URI: | https://scholarbank.nus.edu.sg/handle/10635/192120 | ISSN: | 17483387 |
| Appears in Collections: | Staff Publications Elements |
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| File | Description | Size | Format | Access Settings | Version | |
|---|---|---|---|---|---|---|
| Manuscript_18June2021.pdf | Submitted version | 1.38 MB | Adobe PDF | OPEN | Post-print | View/Download |
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