Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.4980115
Title: Active MEMS metamaterials for THz bandwidth control
Authors: Shih, Kailing 
Pitchappa, Prakash 
Manjappa, Manukumara
Ho, Chong Pei 
Singh, Ranjan
Yang, Bin 
Singh, Navab
Lee, Chengkuo 
Keywords: Science & Technology
Physical Sciences
Physics, Applied
Physics
TERAHERTZ METAMATERIAL
Issue Date: 2017
Publisher: AMER INST PHYSICS
Citation: Shih, Kailing, Pitchappa, Prakash, Manjappa, Manukumara, Ho, Chong Pei, Singh, Ranjan, Yang, Bin, Singh, Navab, Lee, Chengkuo (2017/04/17). Active MEMS metamaterials for THz bandwidth control. APPLIED PHYSICS LETTERS 110 (16). ScholarBank@NUS Repository. https://doi.org/10.1063/1.4980115
Abstract: We experimentally demonstrate a microelectromechanical system (MEMS) based metamaterial with actively tunable resonance bandwidth characteristics, operating in the terahertz (THz) spectral region. The broadband resonance characteristic feature of the MEMS metamaterial is achieved by integrating sixteen microcantilever resonators of identical lengths but with continuously varying release lengths, to form a supercell. The MEMS metamaterial showed broadband resonance characteristics with a full width half maximum (FWHM) value of 175 GHz for resonators with a metal thickness of 900 nm and was further improved to 225 GHz by reducing the metal thickness to 500 nm. The FWHM resonance bandwidth of the MEMS metamaterial was actively switched to 90 GHz by electrostatically controlling the out-of-plane release height of the constituent microcantilever resonators. Furthermore, the electrically controlled resonance bandwidth allows for the active phase engineering with relatively constant intensity at a given frequency based on the reconfiguration state of the MEMS metamaterial. This enables a pathway for the realization of actively controlled transmission or reflection based on dynamically programmable THz metamaterials.
Source Title: APPLIED PHYSICS LETTERS
URI: https://scholarbank.nus.edu.sg/handle/10635/188880
ISSN: 00036951
10773118
DOI: 10.1063/1.4980115
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