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Title: A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation
Authors: Wang, D
Huang, Y
Liu, B
Zhu, L
Lam, J 
Mai, Z
Keywords: Efficiency
Grinding (machining)
Ion beams
Milling (machining)
Scanning electron microscopy
Transmission electron microscopy
Focused ion beam milling
Grinding and polishing
Membrane thickness
Nano-meter scale
Sample preparation
Sample preparation techniques
TEM sample preparation
Thinning methods
Fixtures (tooling)
Issue Date: 2017
Publisher: American Institute of Physics
Citation: Wang, D, Huang, Y, Liu, B, Zhu, L, Lam, J, Mai, Z (2017). A developed wedge fixtures assisted high precision TEM samples pre-thinning method: Towards the batch lamella preparation. AIP Advances 7 (4) : 45207. ScholarBank@NUS Repository.
Rights: Attribution 4.0 International
Abstract: Ion milling, wedge cutting or polishing, and focused ion beam (FIB) milling are widely-used techniques for the transmission electron microscope (TEM) sample preparation. Especially, the FIB milling provides a site-specific analysis, deposition, and ablation of materials in the micrometer and nanometer scale. However, the cost of FIB tools has been always a significant concern. Since it is inevitable to use the FIB technique, the improvement of efficiency is a key point. Traditional TEM sample preparation with FIB was routinely implemented on a single sample each time. Aiming at cost efficiency, a new pre-thinning technique for batch sample preparation was developed in this paper. The present proposal combines the sample preparation techniques with multi-samples thinning, cross-section scanning electron microscopy (SEM), wedge cutting, FIB and other sample pre-thinning techniques. The new pre-thinning technique is to prepare an edge TEM sample on a grinding and polishing fixture with a slant surface. The thickness of the wedges sample can be measured to 1m under optical microscope. Therefore, this fixture is superior to the traditional optical method of estimating the membrane thickness. Moreover, by utilizing a multi-sample holding fixture, more samples can be pre-thinned simultaneously, which significantly improved the productivity of TEM sample preparation. © 2017 Author(s).
Source Title: AIP Advances
ISSN: 2158-3226
DOI: 10.1063/1.4980022
Rights: Attribution 4.0 International
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