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Title: Development of Hybrid Fine Tool Servo System for Nano-machining
Authors: GAN SZE WEI
Keywords: Fine tool servo, diamond turning, non-axisymmetrical surface, micro-features, axial cutting force
Issue Date: 9-Sep-2009
Citation: GAN SZE WEI (2009-09-09). Development of Hybrid Fine Tool Servo System for Nano-machining. ScholarBank@NUS Repository.
Abstract: Nano-machining has been extensively applied in most of the optical and semiconductor industries. Indeed, the machine tool accuracy has become a key factor in obtaining the high quality and high performance parts. In this context, a Fine Tool Servo (FTS) system, particularly made for diamond turning has been comprehensively studied and developed. Two types of FTS systems have been developed for a miniature ultra-precision lathe in this study; ordinary- and hybrid-FTS system. The ordinary FTS is used to increase the accuracy of the machined parts by on-line compensating the waviness error of the translational slide during diamond turning. No additional post-machining processes are needed, and the FTS is virtually high in repeatability, accuracy, and productivity. The experimental results demonstrated that the FTS system can effectively compensate the straightness and waviness errors from the X-axis translational slide. The later system is mainly used to machine the micro-features and non-axisymmetrical surfaces by controlling the tool tip in the function of the translational feed rate (f) and the spindle revolution (s). The system is named as Hybrid FTS system. It is because the hybrid FTS system employs two different position sensors by implementing the dual-sensor feedback control system. The system has been introduced with the purpose of compensating the waviness error and machining the micro-features surfaces simultaneously. The performance of the hybrid FTS system has been proven and the results illustrated the surface quality of the machined components is much better than conventional FTS system. As a conclusion, a new integrated technique of hybrid FTS system and miniature ultra-precision lathe has been presented in this study. The effectiveness of machining the micro-features and non-axisymmetrical surfaces has been proven by machining different types of surfaces. On the other hand, the radial cutting force that has been specially designed for the hybrid FTS system, also showed the flexibility of effectively analyzing the nano-machining phenomenon.
Appears in Collections:Ph.D Theses (Open)

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