THERMAL MODELING OF MICROBOLOMETERS AND MICROEMITTERS

Abstract

The ever increasing demand for infrared radiation sensors implies a constant need for the development of new or improved devices. Traditionally, this involves several designs and fabrication iteration cycles until the desired specifications are met. With the simulation and modeling, the number of trial and error development steps can be reduced, while providing insight into the functioning of sensors and optimization of design. This project covers one dimensional mathematical modeling and three dimensional finite element analysis of thermal parameters and membrane temperature distribution of microbolometers . To validate the above theoretical models, two experiments were carried out, one using a Wheatstone bridge to find out the actual thermal parameters and the second using infrared microscope to read the temperature distribution on the membrane by supplying electrical power to heat up the metal meander. The theoretical modeling and experiment results agree well with each other. Therefore the 1D and 30 modeling methods shown in this thesis can be used as a base line for the design of a microbolometer.