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Title: Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques
Keywords: Resolution enhancement, Refractive Solid Immersion Lens, diffraction integrals, spherical aberration, laser induced fault localization
Issue Date: 20-Jul-2009
Citation: GOH SZU HUAT (2009-07-20). Development and characterization of refractive solid immersion lens technology for far-field integrated circuit faillure analysis using laser induced techniques. ScholarBank@NUS Repository.
Abstract: Backside failure analysis methods have become more important because of the increasing number of metallization levels within an integrated circuit which makes it difficult to locate defects in the active region from the frontside. The transition to new packages like flip-chip and lead-on-chip also contribute to the need for backside analysis techniques. However, the layer of silicon substrate poses tradeoffs in terms of degradations in image resolution. This is due to the high absorption of low wavelength light in silicon as well as additional spherical aberration caused by imaging through a mismatched medium. These give rise to a large diffraction limited resolution of approximately 1 micron using 1340nm wavelength laser. Refractive Solid Immersion Lens technology for spatial resolution enhancements is studied in this work. An analytical model is devised to investigate the theoretical limits. Characterization of resolution based on key design parameters identified is performed. These theoretical findings are verified experimentally on a scanning optical microscope to a correlation accuracy of less than 10%. A resolution enhancement of close to 70% is achieved. This work also optimizes RSIL for backside laser induced fault localization techniques. An enhanced laser induced signal of approximately 12 times is achieved. The last part in this work demonstrates the effectiveness of combining RSIL and pulsed laser technique for 65nm technology node and beyond fault localization. The findings will be useful to provide academia with a theoretical perspective to understand Refractive Solid Immersion Lens. This work also provides useful information to industry with the intention to incorporate and optimize Refractive Solid Immersion into their routine Failure Analysis flow to enhance the current backside fault localization capability.
Appears in Collections:Ph.D Theses (Open)

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