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Title: Hybrid Metamaterial Absorber Platform for Sensing of CO2 Gas at Mid-IR
Authors: Hasan, D 
Lee, C 
Keywords: Carbon dioxide
Chemical sensors
CMOS integrated circuits
Electronic equipment testing
Metallic compounds
MOS devices
Oxide semiconductors
Absorption enhancement
Complementary metal oxide semiconductors
Complementary metal-oxide-semiconductor compatible
Metamaterial absorbers
Non-dispersive infrared
Sensing characteristics
Issue Date: 2018
Citation: Hasan, D, Lee, C (2018). Hybrid Metamaterial Absorber Platform for Sensing of CO2 Gas at Mid-IR. Advanced Science 5 (5) : 1700581. ScholarBank@NUS Repository.
Abstract: Application of two major classes of CO2 gas sensors, i.e., electrochemical and nondispersive infrared is predominantly impeded by the poor selectivity and large optical interaction length, respectively. Here, a novel “hybrid metamaterial” absorber platform is presented by integrating the state-of-the-art complementary metal–oxide–semiconductor compatible metamaterial with a smart, gas-selective-trapping polymer for highly selective and miniaturized optical sensing of CO2 gas in the 5–8 µm mid-IR spectral window. The sensor offers a minimum of 40 ppm detection limit at ambient temperature on a small footprint (20 µm by 20 µm), fast response time (≈2 min), and low hysteresis. As a proof-of-concept, net absorption enhancement of 0.0282%/ppm and wavelength shift of 0.5319 nm ppm−1 are reported. Furthermore, the gas- selective smart polymer is found to enable dual-mode multiplexed sensing for crosschecking and validation of gas concentration on a single platform. Additionally, unique sensing characteristics as determined by the operating wavelength and bandwidth are demonstrated. Also, large differential response of the metamaterial absorber platform for all-optical monitoring is explored. The results will pave the way for a physical understanding of metamaterial-based sensing when integrated with the mid-IR detector for readout and extending the mid-IR functionalities of selective polymers for the detection of technologically relevant gases. © 2018 The Authors. Published by WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Source Title: Advanced Science
ISSN: 2198-3844
DOI: 10.1002/advs.201700581
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