Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/169466
| Title: | Materials & Process Integration for MEMS | Authors: | Tay, Francis EH | Keywords: | Technology & Engineering | Issue Date: | 29-Jun-2013 | Publisher: | Springer Science & Business Media | Citation: | Tay, Francis EH (2013-06-29). Materials & Process Integration for MEMS. ScholarBank@NUS Repository. | Abstract: | These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. | URI: | https://scholarbank.nus.edu.sg/handle/10635/169466 | ISBN: | 1475757913,9781475757910 |
| Appears in Collections: | Staff Publications Elements |
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| File | Description | Size | Format | Access Settings | Version | |
|---|---|---|---|---|---|---|
| Materials and Process Integration for MEMS.docx | Supporting information | 12.19 kB | Microsoft Word XML | OPEN | None | View/Download |
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