Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/169466
Title: Materials & Process Integration for MEMS
Authors: Tay, Francis EH 
Keywords: Technology & Engineering
Issue Date: 29-Jun-2013
Publisher: Springer Science & Business Media
Citation: Tay, Francis EH (2013-06-29). Materials & Process Integration for MEMS. ScholarBank@NUS Repository.
Abstract: These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products.
URI: https://scholarbank.nus.edu.sg/handle/10635/169466
ISBN: 1475757913,9781475757910
Appears in Collections:Staff Publications
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