Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/168820
Title: Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening
Authors: Siew, Shawn Yohanes
Cheung, Eric Jun Hao 
Liang, Haidong
Bettiol, Andrew 
Toyoda, Noriaki
Alshehri, Bandar
Dogheche, Elhadj
Danner, Aaron J. 
Issue Date:  19
Publisher: OSA - The Optical Society
Citation: Siew, Shawn Yohanes, Cheung, Eric Jun Hao, Liang, Haidong, Bettiol, Andrew, Toyoda, Noriaki, Alshehri, Bandar, Dogheche, Elhadj, Danner, Aaron J. (19). Ultra-low loss ridge waveguides on lithium niobate via argon ion milling and gas clustered ion beam smoothening. OPTICS EXPRESS 26 (4) : 4421 - 4430. ScholarBank@NUS Repository.
Abstract: Lithium niobate’s use in integrated optics is somewhat hampered by the lack of a capability to create low loss waveguides with strong lateral index confinement. Thin film single crystal lithium niobate is a promising platform for future applications in integrated optics due to the availability of a strong electro-optic effect in this material coupled with the possibility of strong vertical index confinement. However, sidewalls of etched waveguides are typically rough in most etching procedures, exacerbating propagation losses. In this paper, we propose a fabrication method that creates significantly smoother ridge waveguides. This involves argon ion milling and subsequent gas clustered ion beam smoothening. We have fabricated and characterized ultra-low loss waveguides with this technique, with propagation losses as low as 0.3 dB/cm at 1.55 µm. © 2018 Optical Society of America.
Source Title: OPTICS EXPRESS
URI: https://scholarbank.nus.edu.sg/handle/10635/168820
ISSN: 10944087
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