Large-Scale Transparent Molybdenum Disulfide Plasmonic Photodetector Using Split Bull Eye Structure

Abstract

A high performance photodetector array on transparent substrate is highly sought after for enabling next-generation imaging technology at the visible wavelengths. 2D materials such as molybdenum disulfide (MoS2) are attractive for such application owing to its superior optoelectronic properties and transparency when scaled to atomic thinness. Here, direct growth of MoS2 on centimeter-scale transparent Al2O3 substrate is reported using a high yield and scalable chemical vapor deposition approach. This enables a large area photodetector array to be demonstrated, wherein aluminum split bull eye (SBE) plasmonic structure is integrated to achieve further performance boost due to surface plasmon resonance (SPR) effect. For a wavelength of 405 nm, the plasmonic MoS2 detector achieves an ultralow noise equivalent power of ?6.2 � 10�14 W Hz?1/2 and a high responsivity of 7.26 A W?1 at a small bias of 1.0 V, which is more than 6� larger than the reference detector due to SPR effect. Finite-difference time-domain simulation confirms a higher concentration of optical field distribution at the center of the SBE structure, which is responsible for the enhancement of photocurrent and sensitivity even at low-light condition. � 2018 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim