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Title: Micromachined IR spectrometers for chemical sensing
Keywords: MEMS; lamellar gratings; spectrometer; fourier transform; resonant; reference sampling
Issue Date: 20-Jan-2009
Citation: LEE FEIWEN (2009-01-20). Micromachined IR spectrometers for chemical sensing. ScholarBank@NUS Repository.
Abstract: The objective of this thesis is to report on the development of a Fourier Transform microspectrometer with acceptable resolution and portability capability. Most commercial spectrometers have been characterized as being too delicate, too expensive and too bulky; limiting their usage to be only within laboratory premises. The ability to miniaturize current spectrometer will certainly be welcomed as it increases the portability of the equipment; allowing spectrometers to walk out of laboratories, allowing diagnostic tests to be performed in the field at real time. The miniaturization of the spectrometer is achieved using Micro-electrical Mechanical Systems (MEMS) technology. The first prototype of a lamellar grating based microspectrometer has proven the feasibility of the idea, while subsequent changes are made to the design and actuation methodologies so as to enhance the performance of the spectrometer. Finally, a working FTIR lamellar grating microspectrometer of good resolution and low voltage input requirement is presented.
Appears in Collections:Master's Theses (Open)

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