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Title: | Theoretical study of the behaviour of sputter-roughened surfaces | Authors: | ONG SHEAU WEI | Keywords: | Sputter roughened Monte carlo simulation | Issue Date: | 14-Oct-2008 | Citation: | ONG SHEAU WEI (2008-10-14). Theoretical study of the behaviour of sputter-roughened surfaces. ScholarBank@NUS Repository. | Abstract: | This thesis summarizes the work done in contribution to the understanding of sputtered surfaces in the presence of impurities using atomistic simulation and continuum equation model. The main focus is on the scaling behaviours and parameters that determine the formation of structures on such surfaces.The roughness of the surface is increased with the regularity of the structures dependent on the ease of sputtering for the impurities. The growth exponent is dependent on the time regime and impurity sputtering rate. Formation of structures is strongly dependent on energy distribution.Roughening behaviour is dependent on the degree on inhomogeneity of the surface with the shape of surface structures changes from lenticular to conical when the pining effect of the impurity is strong. The slope of the conical structures can be adjusted by changing the flux and the material. | URI: | http://scholarbank.nus.edu.sg/handle/10635/16067 |
Appears in Collections: | Ph.D Theses (Open) |
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Files in This Item:
File | Description | Size | Format | Access Settings | Version | |
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Chapter 1-Introduction and Aims.pdf | 78.18 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 2-Theoretical Background.pdf | 158.01 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 3-Experimental Background.pdf | 120.82 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 4-Model and Algorithm.pdf | 130.42 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 5-Atomistic-One.pdf | 5.86 MB | Adobe PDF | OPEN | None | View/Download | |
Chapter 6a-Atomistic-two species.pdf | 446.56 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 6b-Atomistic-two species.pdf | 262.33 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 6c-Atomistic-two species.pdf | 250.19 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 6d-Atomistic-two species.pdf | 263.37 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 7a-Continuum.pdf | 561.46 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 7b-Continuum.pdf | 878.47 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 7c-Continuum.pdf | 284.83 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 8-Conclusion.pdf | 47.4 kB | Adobe PDF | OPEN | None | View/Download | |
Chapter 9-References.pdf | 102.53 kB | Adobe PDF | OPEN | None | View/Download | |
Page I - TOC_List.pdf | 116.68 kB | Adobe PDF | OPEN | None | View/Download |
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