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|Title:||Controlled fabrication and assembly of carbon nanotubes based nanostructures||Authors:||WANG LEI||Keywords:||Carbon nanotube assembly position dielectrophoresis CVD||Issue Date:||6-Jun-2008||Citation:||WANG LEI (2008-06-06). Controlled fabrication and assembly of carbon nanotubes based nanostructures. ScholarBank@NUS Repository.||Abstract:||This project focuses on the controlled methods of fabrication and assembly of carbon nanotube based nanostructures as future nanoscale building blocks. Large scale (on 4-inch wafer) vertically aligned multi-walled carbon nanotubes array on Ti electrodes with controlled position as potential vertical interconnect or biosensing probe is fabricated by plasma-enhanced chemical vapor deposition.Individual carbon nanotube is also deposited on SiO2 surface with controlled position and direction by modifying the SiO2 surface with APTS patterned PMMA trench. The width of PMMA trench needs to be smaller than 1 to have single CNT deposited. Carbon nanotubes are also placed between electrodes with controlled position and direction by dielectrophorectic force. Centrifugation of CNTs solution is found to be effective to reduce the number of junk particles. With proper electrode configuration and CNT solution concentration, individual CNT can be precisely positioned between electrodes.||URI:||http://scholarbank.nus.edu.sg/handle/10635/16002|
|Appears in Collections:||Master's Theses (Open)|
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