Development of fringe analysis technique in white light interferometry for micro-component measurement.

Abstract

White light interferometric technique is able to carry out accurate 3-D profile measurements of micro-components without phase ambiguity. In the thesis, a new algorithm based on CWT was developed for gray fringe analysis. A unique measurement system using white light interferometric technique was developed to verify the proposed algorithm with micro-components. The results show that the new algorithm is able to improve the measurement accuracy and perform very well in noisy fringe analysis. Another new algorithm based on color fringe analysis was also proposed in the thesis. CWT was used as a data processing tool in the new technique for color fringe analysis. In this method, a new technique was developed to determine zero-order fringe. It is proven by simulations that the new algorithm is able to achieve very high accuracy, and hence is feasible for white light interferometric fringe analysis in micro and even nano-level applications.