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Title: Design and Fabrication of Ferroelectric Thin Film based Microwave Miniature Tunable Devices
Keywords: microwave, tunable, ferroelectric, thin film, Barium strontium titanate, Bismuth zinc niobate
Issue Date: 3-Jun-2009
Citation: ZHOU LINLIN (2009-06-03). Design and Fabrication of Ferroelectric Thin Film based Microwave Miniature Tunable Devices. ScholarBank@NUS Repository.
Abstract: This study presents a research effort for room temperature microwave planar tunable band-pass filter and phase shifter with barium strontium titanate thin film varactors, as well as characterization of bismuth zinc niobate thin film. Filter is based on coupling of microstrip open-loop resonators. Measurements show central frequency 9.390GHz with tunability 0.8% under 200V bias voltage and insertion loss 2.27dB. Phase shifter consists of coupled microstriplines periodically loaded with BST varactors. Measurements show insertion loss 2.5dB and return loss greater than 10 dB from 8GHz to 12GHz with phase shift 15 degree at 200V DC bias. Characterization of BZN thin film is by extracting the capacitance of parallel plate on platinum coated silicon and interdigital varactors on LAO substrates. Measurement results show relative permittivity 220 and 172, loss tangents 0.0043 and 0.0057 as well as tunability 13% under 500KV/CM and 1.4% under 80KV/cm bias electric field in in-plane and out-plane directions.
Appears in Collections:Master's Theses (Open)

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