Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/154954
DC Field | Value | |
---|---|---|
dc.title | GRAPHENE COLD FIELD EMISSION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY APPLICATIONS | |
dc.contributor.author | SHAO XIUYUAN | |
dc.date.accessioned | 2019-05-31T18:01:21Z | |
dc.date.available | 2019-05-31T18:01:21Z | |
dc.date.issued | 2019-01-17 | |
dc.identifier.citation | SHAO XIUYUAN (2019-01-17). GRAPHENE COLD FIELD EMISSION SOURCES FOR ELECTRON MICROSCOPY AND LITHOGRAPHY APPLICATIONS. ScholarBank@NUS Repository. | |
dc.identifier.uri | https://scholarbank.nus.edu.sg/handle/10635/154954 | |
dc.description.abstract | Cold field emission sources are capable of providing highly coherent and bright electron beams. However, they suffer from some well-known practical difficulties that have prevented their widespread use: unmanageably stringent UHV requirements, relatively large current instabilities, and rapid emission decays. This work presents the development of a completely new type of electron source, a graphene-coated point cathode. The results establish the promising prospect of using them as high brightness-high resolution electron sources, similar in performance to the state-of-art tungsten sources, while at the same time having better emission stability and less stringent vacuum requirements. Another original development coming from this work is the microfabrication and successful emission test of a micron-sized concentric graphene ring-cathode cold field emitter. This type of electron gun can be used in focused beam columns to image ring patterns on a sample directly, without the need to employ a projection mask or a scanning unit. | |
dc.language.iso | en | |
dc.subject | Graphene, Cold field emission, Electron source, Electron microscopy, Electron lithography, Microfabrication | |
dc.type | Thesis | |
dc.contributor.department | ELECTRICAL & COMPUTER ENGINEERING | |
dc.contributor.supervisor | KHURSHEED, ANJAM | |
dc.description.degree | Ph.D | |
dc.description.degreeconferred | DOCTOR OF PHILOSOPHY | |
dc.identifier.orcid | 0000-0002-7852-4379 | |
Appears in Collections: | Ph.D Theses (Open) |
Show simple item record
Files in This Item:
File | Description | Size | Format | Access Settings | Version | |
---|---|---|---|---|---|---|
ShaoXY.pdf | 4.29 MB | Adobe PDF | OPEN | None | View/Download |
Google ScholarTM
Check
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.