Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/153964
Title: FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL)
Authors: LUO JIA
Keywords: VCSEL
Oxidation
Deal & Grove Model
Selectivity
Repeatability
MSA
Uniformity
Oxidation Rate
Gas Flow
Furnace
Issue Date: 2008
Citation: LUO JIA (2008). FEASIBILITY STUDY AND VARIABLES CONTROL OF LATERAL WET OXIDATION PROCESS FOR VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL). ScholarBank@NUS Repository.
Abstract: With the increasing demand for high transmission speed, Vertical Cavity Surface Emitting Laser (VCSEL) attracts millions of the potential for parallel data communication. During the fabrication process, lateral wet oxidation technique is applied to reduce the active region, which upgrades the modulation frequency of the device. With this method, 10GHz transmission rate products are commercialized and researches are working towards 100GHz, even 1000GHz speed. Recently, a set of oxidation facilities is established, including oxidation furnace, bubbler for steam generation and infrared ray microscope. A whole series of experiments are conducted to check the repeatability of the oxidation system as well as the feasibility of microscope. Besides, the dependence on control variables, for example, chamber temperature, gas flow, are studied to get the target oxidation rate.
URI: https://scholarbank.nus.edu.sg/handle/10635/153964
Appears in Collections:Master's Theses (Restricted)

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