Please use this identifier to cite or link to this item:
https://scholarbank.nus.edu.sg/handle/10635/153963
DC Field | Value | |
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dc.title | IMPROVEMENT OF OPTICAL CONTROL MONITOR TO RECTIFY TUNGSTEN PARTICLE PEEL-OFF ISSUE | |
dc.contributor.author | GUO WEIMIN | |
dc.date.accessioned | 2019-05-10T04:54:35Z | |
dc.date.available | 2019-05-10T04:54:35Z | |
dc.date.issued | 2008 | |
dc.identifier.citation | GUO WEIMIN (2008). IMPROVEMENT OF OPTICAL CONTROL MONITOR TO RECTIFY TUNGSTEN PARTICLE PEEL-OFF ISSUE. ScholarBank@NUS Repository. | |
dc.identifier.uri | https://scholarbank.nus.edu.sg/handle/10635/153963 | |
dc.description.abstract | Optical Control Monitor (OCM) structures are features along the scribe lines of wafers, which are required for a variety of functions. The designs of some of these structures have resulted in a tungsten particle peel-off issue, which is detrimental to wafer yield. This project attempts to rectify this issue by removing or redesigning potentially problematic OCM structures. Besides discussing the temporary measures currently in place to contain these issues, the various changes to be made to the overlay and non-overlay structures are introduced and explained. Finally, experimental procedures to verify the effectiveness of the OCM changes and to determine the optimal overlay specifications are proposed. | |
dc.source | SMA BATCHLOAD 20190422 | |
dc.subject | OCM modification | |
dc.subject | tungsten peel-off | |
dc.subject | overlay | |
dc.subject | alignment | |
dc.subject | CMP | |
dc.subject | contamination | |
dc.subject | carbon | |
dc.subject | slurry | |
dc.type | Thesis | |
dc.contributor.department | SINGAPORE-MIT ALLIANCE | |
dc.contributor.supervisor | WONG CHEE CHEONG | |
dc.description.degree | Master's | |
dc.description.degreeconferred | MASTER OF SCIENCE IN ADVANCED MATERIALS FOR MICRO- & NANO- SYSTEMS | |
dc.description.other | Dissertation Supervisor: Associate Professor Wong Chee Cheong, SMA Fellow, NTU | |
Appears in Collections: | Master's Theses (Restricted) |
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File | Description | Size | Format | Access Settings | Version | |
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Guo Weimin_SMA Dissertation (Guo Weimin).pdf | 1.36 MB | Adobe PDF | RESTRICTED | None | Log In |
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