Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/153959
Title: NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY
Authors: ZHONG WEIXIAN
Keywords: tungsten
potassium hydroxide
tip apex diameter
laser-enhanced chemical etching
percentage reduction
alternating current etching,28nm
Issue Date: 2010
Citation: ZHONG WEIXIAN (2010). NANOTIPS FOR DEVICE CHARACTERISATION IN SUB-30NM TECHNOLOGY. ScholarBank@NUS Repository.
Abstract: In this project, laser-enhanced chemical etching with potassium hydroxide (KOH) of varying concentrations was used to modify the in-house fabricated tungsten nanotips to reduce their tip apex diameters. The influence of etchant concentration, i.e., potassium hydroxide on the percentage reduction in apex diameter of nanotips with different tip profiles were studied to provide a model suitable for the development of tips for use in 28nm devices.
URI: https://scholarbank.nus.edu.sg/handle/10635/153959
Appears in Collections:Master's Theses (Restricted)

Show full item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
ZHONG Weixian.pdf2.7 MBAdobe PDF

RESTRICTED

NoneLog In

Page view(s)

32
checked on Jul 10, 2020

Download(s)

1
checked on Jul 10, 2020

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.