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Title: Theoretical and experimental anayses of interface delamination in thin-film/substrate systems
Keywords: nanoindentation, traction separation law, interface delamination, effective stiffness, interface strength, interface energy
Issue Date: 2-Aug-2005
Citation: JIANG HAIYAN (2005-08-02). Theoretical and experimental anayses of interface delamination in thin-film/substrate systems. ScholarBank@NUS Repository.
Abstract: The mechanical behavior and interface adhesion properties of thin film systems during indentation tests have been investigated by finite element method and indentation experiments. In simulations, a traction separation law is employed and the effects of its dominant parameters on the initiation of interface delamination have been investigated by parametric studies. A methodology, which is capable of determining the interface adhesion properties of thin-film/substrate systems has been proposed based on the results of parametric studies. In experiments, the film-only mechanical properties have been derived by re-arranging the load-penetration curves and defining an effective stiffness. The simulation results agree well with the experimental ones: similar characteristics of the load-penetration curves have been observed. The values of the interface adhesion properties of the 500nm BD/Si system are extracted by fitting the load-penetration curve obtained by experiment with the one obtained by simulation.
Appears in Collections:Master's Theses (Open)

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