Probing transient species in plasmas and photodissociation reactions using infrared and raman laser spectroscopy

Abstract

The energy distributions of CO in an acetone/argon dc plasma have been characterized by using Tunable Infrared Diode Laser Spectroscopy (TDLAS) and FTIR absorption spectroscopy. TDLAS, Optical Emission Spectroscopy and FTIR absorption spectroscopy have been applied to the study of CN, CS and other transient species in CH3CN and CH3SCN dc plasmas. The variations of CN and CS with respect to the flow rate of precursor and input current were explored and the plasma chemistry of these transient species was investigated. SiCl4/N2 discharge was studied with focus on SiN free radical and the correlation between the intense signal of SiN and the optimal growth condition for a-SiN films was investigated. The 266 nm pulsed laser photodissociation of NCNCS was investigated. The gas-phase Raman spectra of NCNCS and its photolysis product, CNCN were detected by FTIR and Coherent Anti-Stokes Raman Scattering Spectroscopy. The cleavage mechanism of NCNCS was explored.