MICRO-ELECTRO-MECHANICAL SYSTEM OSCILLATING ACCELERAMETERS WITH CMOS READOUT CIRCUITS

Abstract

This thesis is focused on the design and implementation of the readout circuit for MEMS oscillating accelerometer due to the fact that it can achieve state-of-the-art noise performance and much larger full scale range simultaneously. Complete phase noise model is proposed to analyze the noise contributions of 1/f&179 and 1/f&178 phase noise. Based on the noise model, two accelerometers are implemented for high performance and ultra-low power applications. The first accelerometer investigates the noise contributions in amplitude path and suppresses the 1/f&179 noise, and optimizes the sense interface to attenuate the 1/f&178 noise. The second accelerometer is optimized for power consumption without significant performance deterioration. Both designs achieve state-of-the-art noise performance while providing much larger full scale range. An on-chip frequency measurement circuit is also proposed to digitize the analog frequency for interface purposes.