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|Title:||MICRO-ELECTRO-MECHANICAL SYSTEM OSCILLATING ACCELERAMETERS WITH CMOS READOUT CIRCUITS||Authors:||WANG XI||Keywords:||MEMS, oscillating accelerometer, phase noise, flicker noise, frequency measurement, ultra-low power||Issue Date:||1-Sep-2016||Citation:||WANG XI (2016-09-01). MICRO-ELECTRO-MECHANICAL SYSTEM OSCILLATING ACCELERAMETERS WITH CMOS READOUT CIRCUITS. ScholarBank@NUS Repository.||Abstract:||This thesis is focused on the design and implementation of the readout circuit for MEMS oscillating accelerometer due to the fact that it can achieve state-of-the-art noise performance and much larger full scale range simultaneously. Complete phase noise model is proposed to analyze the noise contributions of 1/f&179 and 1/f&178 phase noise. Based on the noise model, two accelerometers are implemented for high performance and ultra-low power applications. The first accelerometer investigates the noise contributions in amplitude path and suppresses the 1/f&179 noise, and optimizes the sense interface to attenuate the 1/f&178 noise. The second accelerometer is optimized for power consumption without significant performance deterioration. Both designs achieve state-of-the-art noise performance while providing much larger full scale range. An on-chip frequency measurement circuit is also proposed to digitize the analog frequency for interface purposes.||URI:||http://scholarbank.nus.edu.sg/handle/10635/135200|
|Appears in Collections:||Ph.D Theses (Open)|
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