Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/134915
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dc.titleFUNCTIONAL THIN FILMS BY SPATIAL ATOMIC LAYER DEPOSITION FOR PHOTOVOLTAIC APPLICATIONS
dc.contributor.authorNAOMI NANDAKUMAR
dc.date.accessioned2017-02-28T18:00:37Z
dc.date.available2017-02-28T18:00:37Z
dc.date.issued2016-09-26
dc.identifier.citationNAOMI NANDAKUMAR (2016-09-26). FUNCTIONAL THIN FILMS BY SPATIAL ATOMIC LAYER DEPOSITION FOR PHOTOVOLTAIC APPLICATIONS. ScholarBank@NUS Repository.
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/134915
dc.description.abstractThis thesis focuses on the development and analysis of thin films deposited by spatial atomic layer deposition for application in the photovoltaic industry. The atomic layer deposition technique offers good uniformity, conformality and precise film thickness control. The spatial atomic layer deposition technique combines a high throughput with the advantages of conventional atomic layer deposition in obtaining monolayer-by-monolayer growth at a relatively lower cost. The fabrication and development of aluminium oxide films for surface passivation in silicon wafer solar cells and zinc oxide (undoped and doped) films for application as transparent conductive oxides in thin film solar cells and heterojunction silicon solar cells is investigated using this industrially-relevant technique. A detailed understanding of the film properties and their deposition mechanisms is obtained by a series of electrical, optical and structural characterisation techniques. Finally, the application of these films in homojunction and heterojunction crystalline silicon wafer solar cells is also presented.
dc.language.isoen
dc.subjectthin films, spatial atomic layer deposition, photovoltaic, solar, aluminium oxide, zinc oxide
dc.typeThesis
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.supervisorABERLE, ARMIN GERHARD
dc.contributor.supervisorTHOMAS MUELLER
dc.contributor.supervisorBRAM HOEX
dc.description.degreePh.D
dc.description.degreeconferredDOCTOR OF PHILOSOPHY
dc.identifier.isiutNOT_IN_WOS
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