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Title: Laser assisted nano-optics processing in optical data storage
Authors: LIN YING
Keywords: optical data storage, nanolithography, microlens array patterning, near-field scanning optical lithography, phase-change lithography, nanofeature
Issue Date: 7-Sep-2007
Citation: LIN YING (2007-09-07). Laser assisted nano-optics processing in optical data storage. ScholarBank@NUS Repository.
Abstract: Optical lithography techniques have many advantages over other lithography methods although its resolution is limited by optical diffraction. Two optical lithography techniques, microlens array laser patterning and near-field scanning optical lithography, are presented to show their capabilities in nanostructures fabrication. Laser irradiation through microlens array is used to create nanostructures on phase-change films over a large area. Phase-change nanolithography is developed based on the microlens array patterning followed by wet chemical etching to fabricate 3D nanostructures. To further reduce the feature size, near-field scanning optical lithography is employed and the near-field distribution at the fiber tip is simulated to study its effect on the patterned features. Nanostructures fabricated are used as nano-cells for phase-change random access memory to increase its performance. In conclusion, laser-assisted nanolithography techniques are described and applied to optical data storage in this thesis.
Appears in Collections:Ph.D Theses (Open)

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