Fabrication of Micro- and Nano-Fluidic Lab-On-A-Chip Devices Utilizing Proton Beam Writing Technique

Abstract

Proton Beam Writing (PBW) at the Centre for Ion Beam Applications (CIBA), National University of Singapore, is a novel mask-less lithographic technique. It relies on a focused beam of high energy fast ions (MeV protons or H2+) to rapidly pattern resist materials with nanometer scale details. The inherent properties of protons endow the technique with unique advantages in three-dimensional micro- and nano-fabrications. One of the potential applications of the technique is the production of micro- and nanofluidic devices and biochips through both fast prototyping and batch fabrication methods to fulfil the need for synthesized on-chip analysis. For this purpose, we have carried out a series of fabrication attempts which are emphasised in this thesis. Furthermore, characterizations of constructed devises for fluidic and biological studies are presented. The results illustrate potentials of the developed combinative strategies as advanced Lab-on-a-chip technologies, which can also be adopted in other micro- and nanofabrication work.