Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/122340
Title: FABRICATION OF PHOTONIC DEVICES ON LITHIUM NIOBATE ON INSULATOR (LNOI) CHIPS
Authors: SOHAM SATAPARNO SAHA
Keywords: Lithium niobate, Lithium niobate on insulator, lab on a chip, integrated photonic devices, LNOI, lithium niobate fabrication
Issue Date: 19-Aug-2015
Citation: SOHAM SATAPARNO SAHA (2015-08-19). FABRICATION OF PHOTONIC DEVICES ON LITHIUM NIOBATE ON INSULATOR (LNOI) CHIPS. ScholarBank@NUS Repository.
Abstract: The high electro-optic and nonlinear coefficients of lithium niobate make it a highly promising material for optical modulator design, cavity quantum electrodynamics experiments, and microwave photonics. This thesis describes the fabrication techniques developed and optimized to produce low-loss waveguides and resonators in lithium-niobate-on-insulator (LNOI) chips. LNOI chips comprise a thin film of lithium niobate adhering on an insulating substrate like silicon dioxide. Devices fabricated on LNOI through etch-based techniques provide good vertical and mode confinement because of the high index contrast between the waveguiding and cladding regions. Also, because of the smaller waveguide widths attainable, a greater control of the critical dimensions of devices is possible. Optical waveguides, power splitters, and microring resonators are fabricated on lithium-niobate-on-insulator chips, with robust fabrication techniques, namely electron beam lithography (EBL) and ion-beam etching, which have the potential to be used in the mass manufacture of compact lithium niobate based optical devices.
URI: http://scholarbank.nus.edu.sg/handle/10635/122340
Appears in Collections:Master's Theses (Open)

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