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https://scholarbank.nus.edu.sg/handle/10635/119834
DC Field | Value | |
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dc.title | Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications | |
dc.contributor.author | PRABAKARAN SARAVANAN | |
dc.date.accessioned | 2015-05-31T18:01:36Z | |
dc.date.available | 2015-05-31T18:01:36Z | |
dc.date.issued | 2015-01-09 | |
dc.identifier.citation | PRABAKARAN SARAVANAN (2015-01-09). Tribology of self-lubricating SU-8 composites for micro-electro mechanical systems (MEMS) applications. ScholarBank@NUS Repository. | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/119834 | |
dc.description.abstract | The photo-resistive property of epoxy-based SU-8 polymer makes it a potential structural material for micro-fabrication of MEMS devices using the photo-lithography process. However, its poor tribological and mechanical properties are major concerns, if SU-8 has to replace Si, which is the mainstay structural material for making MEMS. Low modulii and hardness present problems in the fabrication and functioning of the micro-machines. Poor tribology will lead to adhesion, friction, wear and early failure of the components. This thesis deals with the preparation of novel SU-8 based composites to enhance the tribological and mechanical properties of the base polymer. It is observed that adding liquid PFPE (Perfluoropolyether; Z-dol 4000) lubricant to SU-8 as filler promotes chemical reactions between the molecules of SU-8 and PFPE, which helps in forming a physical boundary lubrication layer (~10 nm) when this composite is subjected to tribological contacts. This enhances the wear durability of SU-8 by more than four orders of magnitude over its pure form. | |
dc.language.iso | en | |
dc.subject | SU-8 composites, Polymer tribology, Perfluoropolyether, self-lubrication, photo-resist, MEMS | |
dc.type | Thesis | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.contributor.supervisor | DUONG HAI MINH | |
dc.contributor.supervisor | LIM YUI HUNG, CHRISTINA | |
dc.contributor.supervisor | SINHA, SUJEET KUMAR | |
dc.description.degree | Ph.D | |
dc.description.degreeconferred | DOCTOR OF PHILOSOPHY | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Ph.D Theses (Open) |
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File | Description | Size | Format | Access Settings | Version | |
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Prabakanaran S _A0080599N_Complete dissertion _14-5-2015.pdf | 8.71 MB | Adobe PDF | OPEN | None | View/Download |
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