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https://scholarbank.nus.edu.sg/handle/10635/119824
DC Field | Value | |
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dc.title | Laser Chemical Processing (LCP) of Poly-Silicon Thin Film | |
dc.contributor.author | VIRASAWMY SELVEN | |
dc.date.accessioned | 2015-05-31T18:01:26Z | |
dc.date.available | 2015-05-31T18:01:26Z | |
dc.date.issued | 2014-08-14 | |
dc.identifier.citation | VIRASAWMY SELVEN (2014-08-14). Laser Chemical Processing (LCP) of Poly-Silicon Thin Film. ScholarBank@NUS Repository. | |
dc.identifier.uri | http://scholarbank.nus.edu.sg/handle/10635/119824 | |
dc.description.abstract | Laser chemical processing (LCP), developed by Fraunhofer Institute for Solar Energy Systems was successfully applied in fabricating n-type selective emitters and p-type local back surface fields for bulk crystalline silicon wafer solar cells. In this thesis, LCP is demonstrated as a straightforward technique for laser doping of poly-silicon (poly-Si) thin films, thereby overcoming the process complexity related to laser doping on thin films as well as supplying a practically infinite amount of dopants during the doping process. Using a frequency-doubled (532 nm) tunable nanosecond Nd:YAG laser coupled inside a phosphoric acid jet, LCP was successfully applied in fabricating an n-type active layer for poly-silicon thin film solar cells on glass. | |
dc.language.iso | en | |
dc.subject | doping, thin film, polysilicon, laser chemical processing, solar cell | |
dc.type | Thesis | |
dc.contributor.department | MECHANICAL ENGINEERING | |
dc.contributor.supervisor | TAY AH ONG, ANDREW | |
dc.contributor.supervisor | PER INGEMAR WIDENBORG | |
dc.contributor.supervisor | NATALIA MUELLER | |
dc.description.degree | Ph.D | |
dc.description.degreeconferred | DOCTOR OF PHILOSOPHY | |
dc.identifier.isiut | NOT_IN_WOS | |
Appears in Collections: | Ph.D Theses (Open) |
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File | Description | Size | Format | Access Settings | Version | |
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VirasawmyS_PhD thesis.pdf | 9.59 MB | Adobe PDF | OPEN | None | View/Download |
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