Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/118591
DC FieldValue
dc.titleFabrication and characterisation of solid-phase crystallised plasma-deposited silicon thin films on glass for photovoltaic application
dc.contributor.authorAVISHEK KUMAR
dc.date.accessioned2015-01-31T18:00:51Z
dc.date.available2015-01-31T18:00:51Z
dc.date.issued2014-08-01
dc.identifier.citationAVISHEK KUMAR (2014-08-01). Fabrication and characterisation of solid-phase crystallised plasma-deposited silicon thin films on glass for photovoltaic application. ScholarBank@NUS Repository.
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/118591
dc.description.abstractn-type poly-Si films with very large grains, exceeding 30 ?m in width, and with high Hall mobility of about 71.5 cm2/Vs are successfully prepared by the solid phase crystallization (SPC) technique on glass through control of the PH3(2% in H2)/SiH4 gas flow ratio. A significant improvement in the efficiency of p-type poly-Si thin-film solar cells is demonstrated through the improvement of the material quality of the n+ emitter layer. A high-rate (up to 146 nm/minute) conformal PECVD a-Si:H deposition process is established. SPC poly-Si thin films prepared from high rate deposited (146 nm/min) a-Si:H films are shown to have the same (or even slightly better) crystal quality than those deposited at lower deposition rate (~20 nm/min). In addition, a highly absorbing p-type ?-FeSi2(Al) semiconductor film is successfully integrated with n-type SPC poly-Si on glass, creating a functional solar cell device.
dc.language.isoen
dc.subjectpolycrystalline silicon, thin film, solar cells, solid phase crystallisation,high-rate PECVD, characterisation
dc.typeThesis
dc.contributor.departmentELECTRICAL & COMPUTER ENGINEERING
dc.contributor.supervisorABERLE, ARMIN GERHARD
dc.contributor.supervisorPER INGEMAR WIDENBORG
dc.contributor.supervisorGOUTAM KUMAR DALAPATI
dc.description.degreePh.D
dc.description.degreeconferredDOCTOR OF PHILOSOPHY
dc.identifier.isiutNOT_IN_WOS
Appears in Collections:Ph.D Theses (Open)

Show simple item record
Files in This Item:
File Description SizeFormatAccess SettingsVersion 
KumarA.pdf8.6 MBAdobe PDF

OPEN

NoneView/Download

Google ScholarTM

Check


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.