Please use this identifier to cite or link to this item: https://scholarbank.nus.edu.sg/handle/10635/118132
Title: ULTRAVIOLET ROLL-TO-ROLL NANOIMPRINT LITHOGRAPHIC FABRICATION OF FLEXIBLE POLYMER MOULDS
Authors: JARRETT JONATHAN DUMOND
Keywords: Nanoimprinting, Lithography, Nanolithography, Roll-to-Roll, Polymer Moulds, Silicones
Issue Date: 21-Aug-2014
Citation: JARRETT JONATHAN DUMOND (2014-08-21). ULTRAVIOLET ROLL-TO-ROLL NANOIMPRINT LITHOGRAPHIC FABRICATION OF FLEXIBLE POLYMER MOULDS. ScholarBank@NUS Repository.
Abstract: HIGH RESOLUTION RESIN MOULD FABRICATION AT 50 NM LINEWIDTH AND 10 METERS PER MINUTE THROUGHPUT IS DEMONSTRATED VIA UV ROLL-TO-ROLL NANOIMPRINTING. RESIN MOULDS WERE FURTHERMORE EMPLOYED IN BATCH MODE THERMAL NANOIMPRINTING PROCESSES. RESULTS SHOWED AVERAGE NANOSTRUCTURE HEIGHT LOSSES OF 3.7% DUE TO CURING SHRINKAGE, AND A NEGLIGIBLE (< 0.5%) SHRINKAGE FROM THE PMMA THERMAL NANOIMPRINT STEP. RESIN MOULDS CAN ALSO BE PRODUCED FROM FLEXIBLE H-PDMS/PDMS ROLL-MOUNTED MOULDS. THESE BI-LAYER SILICONE MOULDS CAN ABSORB RELEASE AGENT MONOMERS SUCH AS MONOMETHACRYLOXYPROPYL POLYDIMETHYLSILOXANE (MPDMS) FOR TRANSFER TO RESIN MOULD SURFACES DURING UV ROLL-TO-ROLL NANOIMPRINTING. THIS ALLOWS FOR PERMANENT, BUILT-IN CONTROL OVER THE SURFACE ENERGY OF RESIN MOULDS. MPDMS TRANSFER WAS MONITORED VIA XPS AND FITTED TO A FIRST ORDER EXPONENTIAL THAT LEVELED OFF TO 38% OF ITS INITIAL VALUE AFTER 10 IMPRINT CYCLES. ADVANCING WATER CONTACT ANGLE MEASUREMENTS FOUND A STABLE IMPROVEMENT OF 20? FOR RESI
URI: http://scholarbank.nus.edu.sg/handle/10635/118132
Appears in Collections:Ph.D Theses (Open)

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