Please use this identifier to cite or link to this item: https://doi.org/10.1117/12.284032
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dc.titleOptical heterodyne surface profiling interferometer with automatic focusing
dc.contributor.authorHongzhi, Z.
dc.contributor.authorRonga, L.
dc.contributor.authorYongjun, W.
dc.contributor.authorDacheng, L.
dc.contributor.authorMang, C.
dc.date.accessioned2014-12-12T07:36:28Z
dc.date.available2014-12-12T07:36:28Z
dc.date.issued1997
dc.identifier.citationHongzhi, Z., Ronga, L., Yongjun, W., Dacheng, L., Mang, C. (1997). Optical heterodyne surface profiling interferometer with automatic focusing. Proceedings of SPIE - The International Society for Optical Engineering 3185 : 100-104. ScholarBank@NUS Repository. https://doi.org/10.1117/12.284032
dc.identifier.issn0277786X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/116109
dc.description.abstractIn modern semiconductor and optics industries, there is a strong demand for a highly sensitive and non-contact surface profilometer. This paper describes an optical heterodyne surface profiling interferometer with automatic focusing which has been developed recently. The essential feature of the profilometer is a newly designed common-path method to minimizes the effects of environmental conditions. A powerful signal processing scheme is also developed, which includes three parts: automatic voltage control, phase measurement and automatic focusing control. All these make the repeatability and stability of the profiling interferometer greatly improved. The height resolution is 3.5nm and lateral resolution is 0.4μm Experiments show that the profiling interferometer is suitable for on-line use.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1117/12.284032
dc.sourceScopus
dc.subjectAutomatic focusing
dc.subjectAutomatic voltage control
dc.subjectPhase measurement
dc.subjectProfiling interferometer
dc.typeConference Paper
dc.contributor.departmentDATA STORAGE INSTITUTE
dc.description.doi10.1117/12.284032
dc.description.sourcetitleProceedings of SPIE - The International Society for Optical Engineering
dc.description.volume3185
dc.description.page100-104
dc.description.codenPSISD
dc.identifier.isiutA1997BJ98D00011
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