Please use this identifier to cite or link to this item: https://doi.org/10.1063/1.1509100
DC FieldValue
dc.titleUltrathin oxide interfaces on 6H-SiC formed by plasma hydrogenation: Ultra shallow depth profile study
dc.contributor.authorXie, X.
dc.contributor.authorLoh, K.P.
dc.date.accessioned2014-12-12T07:35:22Z
dc.date.available2014-12-12T07:35:22Z
dc.date.issued2002-11-01
dc.identifier.citationXie, X., Loh, K.P. (2002-11-01). Ultrathin oxide interfaces on 6H-SiC formed by plasma hydrogenation: Ultra shallow depth profile study. Journal of Applied Physics 92 (9) : 5173-5176. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1509100
dc.identifier.issn00218979
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/116018
dc.description.abstractSilicon oxide ultrathin films grown on silicon carbide (6H-SiC) by plasma hydrogenation have been studied using ultrashallow depth profiling with time-of-flight secondary ion mass spectrometry. Plasma hydrogenation gives rise to an epitaxial 3 × 3 R30° silicate structure on 6H-SiC(0001) and 6H-SiC(0001̄). By selecting appropriate sputtering conditions, an ultrathin and atomically abrupt interface delineating the boundary between the silicate epilayer (SiO +,Si 2O +, and SiO 3 -,SiO 2 -) and bulk silicon carbide (SiC +) was observed on both C(0001̄) and Si(0001) faces. Differences in the sputtering profile between the C and Si faces suggest an enrichment of the interface stoichiometry by Si and O on the Si face. Our results support the structural models of the silicate on the C and Si-face 6H-SiC(0001) proposed by Starke [Appl. Phys. Lett. 74, 1084 (1999); J. Vac. Sci. Technol. A 17, 688 (1999)]. © 2002 American Institute of Physics.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1063/1.1509100
dc.sourceScopus
dc.typeArticle
dc.contributor.departmentCHEMISTRY
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.description.doi10.1063/1.1509100
dc.description.sourcetitleJournal of Applied Physics
dc.description.volume92
dc.description.issue9
dc.description.page5173-5176
dc.description.codenJAPIA
dc.identifier.isiut000178767200047
Appears in Collections:Staff Publications

Show simple item record
Files in This Item:
There are no files associated with this item.

SCOPUSTM   
Citations

5
checked on May 13, 2022

WEB OF SCIENCETM
Citations

7
checked on May 13, 2022

Page view(s)

231
checked on May 12, 2022

Google ScholarTM

Check

Altmetric


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.