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https://doi.org/10.1063/1.2749865
Title: | Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography | Authors: | Casse, B.D.F. Moser, H.O. Lee, J.W. Bahou, M. Inglis, S. Jian, L.K. |
Issue Date: | 2007 | Citation: | Casse, B.D.F., Moser, H.O., Lee, J.W., Bahou, M., Inglis, S., Jian, L.K. (2007). Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography. Applied Physics Letters 90 (25) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2749865 | Abstract: | Presently existing THz electromagnetic metamaterials were mostly produced as planar single layer structures, either deposited on a substrate or embedded in a polymer matrix, and patterned by a primary pattern generator such as an electron beam, writer or a laser writer. Some attempts to produce more voluminous structures were made using ultraviolet photolithography and a stacking process. We explore deep x-ray lithography and subsequent stacking of chips to fabricate, with good yield, substantial quantities of rod-split-ring structures that come closer to three dimensions than before. Samples were characterized layer-by-layer using Fourier transform interferometry in the far infrared. © 2007 American Institute of Physics. | Source Title: | Applied Physics Letters | URI: | http://scholarbank.nus.edu.sg/handle/10635/116005 | ISSN: | 00036951 | DOI: | 10.1063/1.2749865 |
Appears in Collections: | Staff Publications |
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