Please use this identifier to cite or link to this item:
|Title:||Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography||Authors:||Casse, B.D.F.
|Issue Date:||2007||Citation:||Casse, B.D.F., Moser, H.O., Lee, J.W., Bahou, M., Inglis, S., Jian, L.K. (2007). Towards three-dimensional and multilayer rod-split-ring metamaterial structures by means of deep x-ray lithography. Applied Physics Letters 90 (25) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2749865||Abstract:||Presently existing THz electromagnetic metamaterials were mostly produced as planar single layer structures, either deposited on a substrate or embedded in a polymer matrix, and patterned by a primary pattern generator such as an electron beam, writer or a laser writer. Some attempts to produce more voluminous structures were made using ultraviolet photolithography and a stacking process. We explore deep x-ray lithography and subsequent stacking of chips to fabricate, with good yield, substantial quantities of rod-split-ring structures that come closer to three dimensions than before. Samples were characterized layer-by-layer using Fourier transform interferometry in the far infrared. © 2007 American Institute of Physics.||Source Title:||Applied Physics Letters||URI:||http://scholarbank.nus.edu.sg/handle/10635/116005||ISSN:||00036951||DOI:||10.1063/1.2749865|
|Appears in Collections:||Staff Publications|
Show full item record
Files in This Item:
There are no files associated with this item.
checked on Nov 19, 2019
WEB OF SCIENCETM
checked on Nov 11, 2019
checked on Nov 8, 2019
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.