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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2006.03.170
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dc.titleSelf-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering
dc.contributor.authorTan, S.K.
dc.contributor.authorLiu, R.
dc.contributor.authorSow, C.H.
dc.contributor.authorWee, A.T.S.
dc.date.accessioned2014-12-12T07:34:14Z
dc.date.available2014-12-12T07:34:14Z
dc.date.issued2006-07
dc.identifier.citationTan, S.K., Liu, R., Sow, C.H., Wee, A.T.S. (2006-07). Self-organized nanodot formation on InP(1 0 0) by oxygen ion sputtering. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 248 (1) : 83-89. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2006.03.170
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/115927
dc.description.abstractWe demonstrate the formation of ordered nanodot chains with dot size less than 100 nm by 1 keV O2 + beam sputtering on InP(1 0 0). The ordered nanodot chains are perpendicularly aligned to the ion beam direction, and are formed at 38° and 44° incidence with ion current density of 100 μA cm-2. At 56° and 62° incidence, the nanodot chains formed are shorter and more coarse, and the periodicity of the nanodot chains is suppressed. XPS analysis show that the surface of nanodots formed comprise In2O3 and various InP oxides; and is In2O3-rich due to the preferential sputtering of P atoms. © 2006 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nimb.2006.03.170
dc.sourceScopus
dc.subjectInP
dc.subjectIon beam sputtering
dc.subjectNanodots
dc.typeArticle
dc.contributor.departmentINSTITUTE OF ENGINEERING SCIENCE
dc.contributor.departmentPHYSICS
dc.description.doi10.1016/j.nimb.2006.03.170
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume248
dc.description.issue1
dc.description.page83-89
dc.description.codenNIMBE
dc.identifier.isiut000238767300015
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