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https://doi.org/10.1063/1.3673593
Title: | Self-organized ZnO nanodot arrays: Effective control using SiN x interlayers and low-temperature plasmas | Authors: | Huang, S.Y. Cheng, Q.J. Xu, S. Wei, D.Y. Zhou, H.P. Long, J.D. Levchenko, I. Ostrikov, K. |
Issue Date: | 1-Feb-2012 | Citation: | Huang, S.Y., Cheng, Q.J., Xu, S., Wei, D.Y., Zhou, H.P., Long, J.D., Levchenko, I., Ostrikov, K. (2012-02-01). Self-organized ZnO nanodot arrays: Effective control using SiN x interlayers and low-temperature plasmas. Journal of Applied Physics 111 (3) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3673593 | Abstract: | An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiN x buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications. © 2012 American Institute of Physics. | Source Title: | Journal of Applied Physics | URI: | http://scholarbank.nus.edu.sg/handle/10635/115280 | ISSN: | 00218979 | DOI: | 10.1063/1.3673593 |
Appears in Collections: | Staff Publications |
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