Please use this identifier to cite or link to this item: https://doi.org/10.1088/0022-3727/36/7/323
Title: Differential algebraic method for arbitrary order curvilinear-axis combined geometric-chromatic aberration analysis
Authors: Cheng, M.
Tang, T.
Lu, Y.
Yao, Z. 
Issue Date: 7-Apr-2003
Citation: Cheng, M., Tang, T., Lu, Y., Yao, Z. (2003-04-07). Differential algebraic method for arbitrary order curvilinear-axis combined geometric-chromatic aberration analysis. Journal of Physics D: Applied Physics 36 (7) : 924-928. ScholarBank@NUS Repository. https://doi.org/10.1088/0022-3727/36/7/323
Abstract: The principle of differential algebra is applied to analyse and calculate arbitrary order curvilinear-axis combined geometric-chromatic aberrations of electron optical systems. Expressions of differential algebraic form of high order combined aberrations are obtained and arbitrary order combined aberrations can be calculated numerically. As an example, a typical wide electron beam focusing system with curved optical axes named magnetic immersion lens has been studied. All the second-order and third-order combined geometric-chromatic aberrations of the lens have been calculated, and the patterns of the corresponding geometric aberrations and combined aberrations have been given as well.
Source Title: Journal of Physics D: Applied Physics
URI: http://scholarbank.nus.edu.sg/handle/10635/114635
ISSN: 00223727
DOI: 10.1088/0022-3727/36/7/323
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