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Please use this identifier to cite or link to this item: https://doi.org/10.1016/j.nimb.2009.03.103
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dc.titleProton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures
dc.contributor.authorYue, W.
dc.contributor.authorRen, Y.
dc.contributor.authorvan Kan, J.A.
dc.contributor.authorChiam, S.-Y.
dc.contributor.authorJian, L.
dc.contributor.authorMoser, H.O.
dc.contributor.authorOsipowicz, T.
dc.contributor.authorWatt, F.
dc.date.accessioned2014-11-28T06:33:45Z
dc.date.available2014-11-28T06:33:45Z
dc.date.issued2009-07-01
dc.identifier.citationYue, W., Ren, Y., van Kan, J.A., Chiam, S.-Y., Jian, L., Moser, H.O., Osipowicz, T., Watt, F. (2009-07-01). Proton beam writing and electroplating for the fabrication of high aspect ratio Au microstructures. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (14) : 2376-2380. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.103
dc.identifier.issn0168583X
dc.identifier.urihttp://scholarbank.nus.edu.sg/handle/10635/112636
dc.description.abstractWe present an approach to fabricate tall high aspect ratio Au microstructures by means of proton beam direct writing. Combining proton beam direct writing and electroplating, we successfully produced gold structures with sub-micrometer lateral dimensions, structure heights in excess of 11 μm, and aspect ratios over 28. Sidewall quality of the Au structures was improved by lowering the process temperature to 20 °C when developing PMMA patterns with GG developer. The application of such structures as X-ray masks for deep X-ray lithography with synchrotron radiation was demonstrated. © 2009 Elsevier B.V. All rights reserved.
dc.description.urihttp://libproxy1.nus.edu.sg/login?url=http://dx.doi.org/10.1016/j.nimb.2009.03.103
dc.sourceScopus
dc.subjectAu microstructure
dc.subjectElectroplating
dc.subjectHigh aspect ratio
dc.subjectProton beam writing
dc.typeArticle
dc.contributor.departmentPHYSICS
dc.contributor.departmentSINGAPORE SYNCHROTRON LIGHT SOURCE
dc.contributor.departmentNUS NANOSCIENCE & NANOTECH INITIATIVE
dc.description.doi10.1016/j.nimb.2009.03.103
dc.description.sourcetitleNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
dc.description.volume267
dc.description.issue14
dc.description.page2376-2380
dc.description.codenNIMBE
dc.identifier.isiut000268268000008
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