Optical interferometric inspection of surface contour of MEMS-components
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Abstract
In this paper, we describe an optical interferometer applied to 3D inspection of micro-components. The resulting interference fringes that are related to the deformation and surface contour of MEMS-components are analyzed by the fast Fourier transform (FFT) and 3-step phase-shifting algorithms. Experimental results show the feasibility of the proposed method for 3D deformation and surface contour measurement of micro-components.
Keywords
MEMS, Micro-accelerometer, Micro-components, Micromirror, Optical interferometry, Single fiber-end surface
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Key Engineering Materials
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Date
2006
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Type
Conference Paper