Near-IR photon emission spectroscopy on strained and unstrained 60 nm silicon nMOSFETs
Tan, S.L. Ang, K.W. Toh, K.H. Isakov, D. Chua, C.M. Koh, L.S. Yeo, Y.C. Chan, D.S.H. Phang, J.C.H.
Tan, S.L.
Ang, K.W.
Toh, K.H.
Isakov, D.
Chua, C.M.
Koh, L.S.
Citations
Altmetric:
Alternative Title
Abstract
Spectral analysis of near IR photon emissions was performed on unstrained as well as uniaxial tensile strained nMOSFETs with physical gate length of 60 nm. The significant differences in the observed spectra could be attributed to the strain-induced bandgap narrowing. This shows that photon emission spectroscopy could potentially be used as a tool to monitor strain in the nMOSFET channel. Copyright © 2007 ASM International® All rights reserved.
Keywords
Source Title
Conference Proceedings from the International Symposium for Testing and Failure Analysis
Publisher
Series/Report No.
Collections
Rights
Date
2007
DOI
Type
Conference Paper