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Fu Jun

rp04913

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Profile

Full Name
Fu Jun
(not current staff)
Variants
Fu, J.
 
Main Affiliation
 
Faculty
 
Email
elefuj@nus.edu.sg
 
Other emails
 

Publications

Refined By:
Author:  Tay, A.

Results 1-4 of 4 (Search time: 0.004 seconds).

Issue DateTitleAuthor(s)
12008CD uniformity control via real-time control of photoresist propertiesChen, M.; Fu, J. ; Ho, W.K. ; Tay, A. 
2Dec-2008Critical dimension and real-time temperature control for warped wafersHo, W.K. ; Tay, A. ; Fu, J. ; Chen, M.; Feng, Y.
3Nov-2007Critical dimension uniformity via real-time photoresist thickness controlHo, W.K. ; Tay, A. ; Chen, M.; Fu, J. ; Lu, H.; Shan, X.
42001Spatially-programmable thermal processing module for 300 mm wafer processingTay, A. ; Khiang Wee Lim; Ai Poh Loh; Woei Wan Tan; Weng Khuen Ho; Huang, A. ; Fu, J.